Authors : N. Ikhlef , A. Rezig , M.R. Mekideche , O. Leroy and P. Leprince
Abstract: We present in this study a 3D numerical modelling of a microwave discharge (2.45GHz) excited by a surface wave in a large and small diameter cylindrical plasma cavity. Our first studies have been focused on the influence of the vertical situation of a short circuit in order to optimize the power coupling in the discharge. We used the CST microwave studio commercial code which solves Maxwell equations using the Finite Integration Technique (FIT).
N. Ikhlef , A. Rezig , M.R. Mekideche , O. Leroy and P. Leprince , 2007. Situation Cavity Effect on Power Absorbed by Plasma Microwave . Journal of Engineering and Applied Sciences, 2: 1157-1160.