Authors : D.V. Gusev, R.S. Litvinenko and V.S. Sukhanov
Abstract: Tactile sensor technologies are rapidly being evolved and interest in them is growing steadily. The main constraint in this area is not the limitation on the processing power of the applied processors but the absence of technology capable of transforming the volumetric tactile interaction into an electrical signal. The study presents, the design of a complex tactile structure based on silicon MEMS-CMOS crystals, containing piezoresistive sensitive elements. The tactile structure is developed for use in robotics and tactile diagnostics applications. The structure is covered with silicon layer for protection of the sensitive elements. The study presents, the results of research of determining the location of point-touch.
D.V. Gusev, R.S. Litvinenko and V.S. Sukhanov, 2016. Research of Tactile Structure Based on MEMS Sensitive Elements for Robotics and Tactile Diagnostics Devices. Journal of Engineering and Applied Sciences, 11: 1366-1369.