Authors : D.V. Gusev, R.S. Litvinenko and V.S. Sukhanov
Abstract: Owing to rapidly developing methods of minimally invasive surgery a new class of devices appeared. These devices are known as tactile sensors for remote palpation. They give a possibility to the surgeon not to enter into direct contact with the internal organs of the patient and obtain tactile data. The article presents the circuitry design of a silicon crystal matrix of piezoresistive pressure sensing elements MIPD-32 for tactile diagnostics devices. The crystal is manufactured by means of combination of MEMS and CMOS technologies. The research results of the characteristics of the crystals are shown.
D.V. Gusev, R.S. Litvinenko and V.S. Sukhanov, 2016. Research of Silicon MEMS Pressure Transducers Crystals for Robotics and Tactile Diagnostics Devices. Journal of Engineering and Applied Sciences, 11: 1363-1365.