Authors : Sadegh Mohammad Zadeh Bazarchi and Ebrahim Abaspoor Sani
Abstract: In this study is about the design and simulation of Hot Cathode Filament (HCF) for genesis of Cathode Ray (CR) at the MEMS scale. On the plan of this study nickel with a layer of oxide forms the cathode and is capable of emitting electrons with 50 nA current at the temperature of 750°C. Also, it is considered that the temperature is almost constant along the cathode and the emission of electrons is uniform in different parts. Furthermore, the cathode temperature is independent of the vacuum pressure. The grid voltage which provides the initial energy for electros is controllable providing the ability of turning the beam ON and OFF. It must be mentioned that the power consumption of the cathode is low (69.2 mW) and its dimensions are 2.5×1.5×0.5 mm. For the case of no target utilization, the energy of electrons reaches the value of 429 eV. On the design of this scheme the MEMS technology has been employed and the distance of anode network, height, thickness, number of the rods and other specifications of the anode to achieve the highest number and highest energy for the electrons have been determined by simulations carried out using COMSOL. In addition, the analysis of cathode temperature, cathode tension, electron movements, potential and electric field have been performed in this study.
Sadegh Mohammad Zadeh Bazarchi and Ebrahim Abaspoor Sani, 2017. Design and Simulation of MEMS Type Cathodic Ray Generator. Journal of Engineering and Applied Sciences, 12: 4475-4481.