Journal of Engineering and Applied Sciences

Year: 2017
Volume: 12
Issue: 12
Page No. 3077 - 3082

Thermal Stress Analysis on Cleaving Sapphire Material by CO2 Laser

Authors : Alias Mohd Saman, Tatsuaki Furumoto, Akira Hosokawa and Takashi Ueda

References

Imai, Y., H. Morita, T. Takase and H. Koga, 1989. Possibility of employing thermal stresses as a cutting device for brittle materials. Trans. Jpn. Soc. Mech. Eng., 55: 147-151.

Kurobe, T., K. Ichikawa and H. Nagai, 1995. Breaking of silicon wafer by irradiation of YAG laser. J. Soc. Mater. Sci. Jpn., 44: 159-163.

Lumley, R.M., 1969. Controlled separation of brittle materials using a laser. Am. Ceram. Soc. Bull., 48: 850-854.

Triantafyllidis, D., J.R. Bernstein, L. Li and F.H. Stott, 2003. Dual laser beam modification of high alumina ceramics. J. Laser Appl., 15: 49-54.
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Ueda, T., K. Yamada, K. Oiso and A. Hosokawa, 2002. Thermal stress cleaving of brittle materials by laser beam. CIRP. Ann. Manuf. Technol., 51: 149-152.

Ueda, T., T. Mino, T. Furumoto, A. Hosokawa and S. Nagatomo, 2011. Laser cleaving of sapphire wafer with pulsed wafer. J. Jpn. Soc. Grinding Eng., 55: 424-426.

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